栅介质材料及尺寸对薄膜晶体管性能影响研究

裴智慧,秦国轩

Investigation on the influence of gate dielectric material and size onthin⁃film transistors performance

Zhihui Pei,Guoxuan Qin

南京大学学报(自然科学版) . 2019, (5): 740 -749 . DOI: 10.13232/j.cnki.jnju.2019.05.005