PDF(590309 KB)
PDF(590309 KB)
PDF(590309 KB)
用于压电微机电系统的高性能压电薄膜
({{custom_author.role_cn}}), {{javascript:window.custom_author_cn_index++;}} High performance ferroelectric thin films for better
piezoelectric micro electromechanical systems*
({{custom_author.role_en}}), {{javascript:window.custom_author_en_index++;}}| {{custom_ref.label}} |
{{custom_citation.content}}
{{custom_citation.annotation}}
|
/
| 〈 |
|
〉 |