ZnO/ 36?YX- LiTaO 3 结构的 Love 波免疫传感器灵敏度研究*

南京大学学报(自然科学版) ›› 2011, Vol. 47 ›› Issue (2): 182–188.

ZnO/ 36?YX- LiTaO 3 结构的 Love 波免疫传感器灵敏度研究*

宋明太, 周凤梅, 范理, 张淑仪 **

出版日期:2015-04-08 发布日期:2015-04-08
作者简介: (南京大学声学研究所, 近代声学实验室, 南京, 210093
基金资助:
国家自然科学基金( 10774074)

A study of sensitivities of Love-wave immunosensors based on ZnO/ 36 YX- LiTaO 3 structures

Song Ming T ai , Zhou Feng?Mei , Fan Li, Zhang Shu Yi

Online:2015-04-08 Published:2015-04-08
About author: ( Laboratory of Modern Acoustics, Institute of Acoustics, Nanjing University, Nanjing, 210093, China)

摘要/Abstract

摘要： 对于 ZnO/36ºYX- LiTaO 3 结构的 Love 波免疫传感器, 免疫传感实验的结果表明, 不同的波导层厚度, 免疫传感的灵敏度不同. 同时, 存在最佳 ZnO 波导层厚度, 使得 Love 波免疫传感器的灵敏度
达到最高. 本文根据多层薄膜中弹性波传播理论, 运用部分波求解方法, 对 ZnO/36 ºYX- LiTaO 3 结构的 Love 波器件的相速度及相对质量灵敏度与波导层的厚度的关系进行了数值计算. 计算结果表明, 当
相对于波长归一化膜厚为 0~ 0.1 范围内, 随着波导层厚度的增加, Love 波器件在无负载和有负载条件下的相速度均随之减少; 相对质量灵敏度则先随波导层厚度的增加而增加, 继而随波导层厚度的增加而
减少, 即存在一个适当值使得 Love 波器件的相对质量灵敏度最大, 该结果与实验基本吻合.

Abstract: Love wave sensors have been widely used because of their high sensitivities. Meanwhile, they can be used for detecting harmful gases in gas environments and also some chemical or biological substances in liquid
environments. T herefore, researches on Love wave sensors are attracting a great attention in recent years. In this paper, Love -mode immunosensors based on ZnO/36 ºYX- LiTaO 3 structures are fabricated and the
sensitivities of the immunosensors are studied. The sensitivity of Love wave sensors is affected by many factors, and the thickness of the guiding layers is a critical factor. Because the guiding layers can trap the acoustic energy to near
surfaces of the Love wave sensors, the sensors display especially sensitive to surface perturbations. The experimental results show that when the thicknesses of the ZnO guiding layers are changed, the
sensitivities of the immunosensors are also different; at the same time, there are optimum thicknesses of the ZnO guiding layers that make the sensitivities of the immunosensors to be the highest. T heoretical studies on Love wave
devices based on ZnO/ 36º YX - LiTaO 3 structures are carried out using partial wave theory of elastic waves propagation in thin films. Then the relationships between the normalized thickness of the guiding layer and
sensitivities of the Love devices are studied. The numerical results demonstrate that when the normalized thickness of the guiding layer is in the range 0~ 0?10, the phase velocities of the Love devices decrease with increasing the
thicknesses of the guiding layers with surface free and also mass loading. Meanwhile, the sensitivities increase firstly with increasing layer thicknesses, then decrease with the layer thicknesses further increase, i. e. , there are
optimum thicknesses for getting the maximum sensitivities, which are in agreement with the experimental results roughly.

宋明太, 周凤梅, 范理, 张淑仪 ** . ZnO/ 36?YX- LiTaO 3 结构的 Love 波免疫传感器灵敏度研究*

[J]. 南京大学学报(自然科学版), 2011, 47(2): 182–188.

Song Ming T ai , Zhou Feng?Mei , Fan Li, Zhang Shu Yi . A study of sensitivities of Love-wave immunosensors based on ZnO/ 36 YX- LiTaO 3 structures

[J]. Journal of Nanjing University(Natural Sciences), 2011, 47(2): 182–188.

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