基于石墨烯敏感层的高灵敏度声表面波氢气传感器性能优化

李聆声, 范理, 张淑仪, 程利平, 徐晓东, 赵瑾瑜, 张辉

Performance optimization of a high⁃sensitivity surface acoustic wave hydrogen sensor based on a graphene⁃like sensitive layer

Lingsheng Li, Li Fan, Shuyi Zhang, Liping Cheng, Xiaodong Xu, Jinyu Zhao, Hui Zhang

图1 声表面波氢气传感器的基本结构

Fig.1 The structure of surface acoustic wave hydrogen sensor