全介质硅基微腔结构的模拟与实验研究

王朝晔,侯国智,李伟,徐骏,陈坤基

Simulation and experimental study of all⁃dielectric silicon⁃based microcavity structure

Zhaoye Wang,Guozhi Hou,Wei Li,Jun Xu,Kunji Chen

图4 中心波长为1.1 μm的微腔的剖面SEM照片(a)，模拟和实验得到的透射谱(b)，中心波长为2.0 μm的微腔的模拟和实验得到的透射谱(c)

Fig.4 Microcavity with a center wavelength of 1.1 μm: (a) cross?section SEM photograph, (b) transmission spectrum obtained from simulation and experiment，(c) simulation and experimental transmission spectra of a microcavity with a center wavelength of 2.0 μm