全介质硅基微腔结构的模拟与实验研究

王朝晔,侯国智,李伟,徐骏,陈坤基

Simulation and experimental study of all⁃dielectric silicon⁃based microcavity structure

Zhaoye Wang,Guozhi Hou,Wei Li,Jun Xu,Kunji Chen

图3 (a)分别具有2，2.5，3个反射周期的微腔的模拟透射谱；(b)分别具有3.5，4个反射周期的微腔的模拟透射谱；(c)中心波长分别为1.1，1.5和2.0 μm的结构C微腔的模拟透射谱；(d)中心波长为1.1 μm的结构C微腔在短波段的模拟透射谱

Fig.3 Simulated transmission spectra of microcavity with (a) 2, 2.5 and 3 reflection periods,(b) 3.5 and 4 reflection periods, respectively，simulated transmission spectra of structure C microcavities with (c) center wavelength of 1.1, 1.5 and 2.0 μm, respectively，(d) center wavelength of 1.1 μm in the short band