全介质硅基微腔结构的模拟与实验研究

王朝晔,侯国智,李伟,徐骏,陈坤基

Simulation and experimental study of all⁃dielectric silicon⁃based microcavity structure

Zhaoye Wang,Guozhi Hou,Wei Li,Jun Xu,Kunji Chen

图1 (a) a?SiN_x的折射率和Si/N原子比随 $[N H_{3}] / [S i H_{4}]$ 的变化曲线；(b) a?SiN_yO_z的折射率和Si/O原子比随 $[N_{2} O] / [S i H_{4}]$ 的变化曲线

Fig.1 (a) a?SiN_x's refractive index and Si/N atomic ratio with different ratio of $[N H_{3}] / [S i H_{4}]$ ，(b) a?SiN_yO_z's refractive index and Si/O atomic ratio with different ratio of $[N_{2} O] / [S i H_{4}]$