全介质硅基微腔结构的模拟与实验研究

王朝晔,侯国智,李伟,徐骏,陈坤基

Simulation and experimental study of all⁃dielectric silicon⁃based microcavity structure

Zhaoye Wang,Guozhi Hou,Wei Li,Jun Xu,Kunji Chen

图2 三种微腔的剖面结构示意图

Fig.2 Schematic diagram of the cross?section structure of three microcavities