栅介质材料及尺寸对薄膜晶体管性能影响研究 |
裴智慧,秦国轩 |
Investigation on the influence of gate dielectric material and size onthin⁃film transistors performance |
Zhihui Pei,Guoxuan Qin |
图4 不同栅介质层厚度的TFT对应的性能曲线的对比图 |
Fig.4 Comparison of the performance curves of TFTs with different gate dielectric thickness |