栅介质材料及尺寸对薄膜晶体管性能影响研究

裴智慧,秦国轩

Investigation on the influence of gate dielectric material and size onthin⁃film transistors performance

Zhihui Pei,Guoxuan Qin

图1 晶体管结构图和性能曲线图

Fig.1 The transistor structure diagram and performance curves