Current status and development of mainstream metal precursors for semiconductors
Xiaojin Wang, Changming Hu, Wei Qiao, Bowen Wang, Wenjiao Luo, Huangxian Ju, Shuhua Li, Jinlou Gu, Min Yang
Journal of Nanjing University(Natural Sciences) . 2026, (3): 485 -504 .  DOI: 10.13232/j.cnki.jnju.2026.03.014

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