Investigation on luminescent defect state related to N­Si­O bonding
in amorphous oxygenated Silicon nitride film

 Dong Hengping1，2，3*，Chen Kunji2，3，Zong Bo1，Jing Elin1，Wang Hao1，Dou Rufeng1，Guo Yan1，Xu Jun2，3

Journal of Nanjing University(Natural Sciences) ›› 2017, Vol. 53 ›› Issue (3) : 392.

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Journal of Nanjing University(Natural Sciences) ›› 2017, Vol. 53 ›› Issue (3) : 392.

 Investigation on luminescent defect state related to N­Si­O bonding
in amorphous oxygenated Silicon nitride film

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2017, 53(3): 392

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