Formation and electrical properties of high conductively doped nanocrystalline silicon embedded in amorphous silicon carbide

Ji Yang，Shan Dan，Qian Mingqing，Li Wei，Xu Jun*，Chen Kunji

Journal of Nanjing University(Natural Sciences) ›› 2016, Vol. 52 ›› Issue (5) : 780.

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PDF(1980182 KB)
Journal of Nanjing University(Natural Sciences) ›› 2016, Vol. 52 ›› Issue (5) : 780.

Formation and electrical properties of high conductively doped nanocrystalline silicon embedded in amorphous silicon carbide

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2016, 52(5): 780

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