High performance ferroelectric thin films for better
piezoelectric micro electromechanical systems*

 Kiyotaka Wasa**

Journal of Nanjing University(Natural Sciences) ›› 2013, Vol. 49 ›› Issue (1) : 32-39.

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PDF(590309 KB)
Journal of Nanjing University(Natural Sciences) ›› 2013, Vol. 49 ›› Issue (1) : 32-39.

 High performance ferroelectric thin films for better
piezoelectric micro electromechanical systems*

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2013, 49(1): 32-39

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