南京大学学报(自然科学版) ›› 2020, Vol. 56 ›› Issue (5): 737–743.doi: 10.13232/j.cnki.jnju.2020.05.013
• • 上一篇
全介质硅基微腔结构的模拟与实验研究
王朝晔,侯国智,李伟,徐骏(
),陈坤基
- 固体微结构物理国家重点实验室，南京大学电子科学与工程学院，南京，210093
Simulation and experimental study of all⁃dielectric silicon⁃based microcavity structure
Zhaoye Wang,Guozhi Hou,Wei Li,Jun Xu(),Kunji Chen
- National Laboratory of Solid State Microstructures, School of Electronic Science and Engineering, Nanjing University, Nanjing, 210093, China
摘要：
硅基微腔结构在许多光学与光电子器件领域都有重要的应用.针对微腔结构在热光伏系统中的可能应用，结合理论与实验进行了研究.通过利用等离子体增强化学气相沉积技术制备了非晶氮化硅与氮氧化硅薄膜，获得相应的光学常数，然后利用软件模拟研究不同结构的微腔的光学特性，进而制备一维光子微腔结构，在中心波长为1.1
中图分类号:
- TN36
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