南京大学学报(自然科学版) ›› 2017, Vol. 53 ›› Issue (3): 387.
• • 下一篇
徐奇峰,张鑫鑫,马忠元*,吴仰晴,林泽文,徐 岭,李 伟,陈坤基,黄信凡,徐 骏,冯 端
Xu Qifeng,Zhang Xinxin,Ma Zhongyuan*,Wu Yangqing,Lin Zewen,Xu Ling,Li Wei,Chen Kunji,Huang Xinfan,Xu Jun,Feng Duan
摘要: 采用聚苯乙烯(PS)纳米小球自组装技术结合激光退火方法制备了三种不同尺寸纳米银球阵列,研究不同尺寸纳米银球阵列对非晶掺氧氮化硅(aSiNx∶O)薄膜的光致发光的影响.首先,在p型硅衬底上铺有三种不同尺寸的聚苯乙烯(PS)纳米小球,再采用磁控溅射系统蒸镀银薄膜,然后用激光对该银薄膜进行处理.最后,采用等离子体增强化学气相沉积(PECVD)系统在样品表面生长非晶掺氧氮化硅薄膜.实验结果表明,相比于未引入纳米银球阵列的aSiNx∶O薄膜,引入170 nm、220 nm和300 nm银球阵列的aSiNx∶O薄膜,其光致发光强度(PL)分别增强4.6、3.1和1.3倍.样品的原子力显微镜(AFM)图像显示,纳米银颗粒呈周期性排列且尺寸可控.荧光光谱分析表明,随着纳米银球阵列尺寸的增加,薄膜的发光峰位出现了红移.通过分光光度计UV3600对aSiNx∶O薄膜的消光谱进行了测量计算.为了进一步研究不同尺寸纳米银球阵列对非晶掺氧氮化硅(aSiNx∶O)薄膜的光致发光的影响,对其消光谱和PL谱进行了对比分析.实验证实了aSiNx∶O薄膜光致发光的增强来自于金属银局域表面等离激元(LSP)与aSiNx∶O薄膜光发射之间的耦合.
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